【作者】 吝海锋； 吕苗； 杨拥军； 师谦； 郑锋； 恩云飞；

【Author】 Lin Haifeng Lu Miao Yang Yongjun Shi Qian Zheng Feng En Yunfei13th Institute,China Electronic Technology Group Corporation,Shi Jia Zhuang,050051China Electronic Product Reliability and Environmental Testing lnstitue,GuangZou,510610

【机构】 中国电子科技集团公司第十三研究所； 中国电子产品可靠性与环境实验研究所；

【摘要】 探讨了MEMS电容式加速度计的结构、电路、制造工艺和系统等各方面的可靠性,总结出了表面粘附、结构断裂、分屡失效和辐射失效等几种主要失效模式,并进行相应的失效机理分析。通过可靠性实验进行了验证,发现非致命的环境影响因素中,温度对电容式加速度计性能影响最大,最终完成了满足实用化要求的MEMS微加速度计设计。更多还原

【Abstract】 The reliability of MEMS capacitive accelerometers in design, processing and packaging was discussed. The main failure modes including surface adhesion, fracture, and metallic layer delaminating and radiation failure were described. The mechanism of these failure modes was proposed respectively, and were validated through experiments. Furthermore, environmental temperature is proved to be as the main effect on performance of the capacitive accelerome-ter. Finally, a series of high reliability MEMS capacitive accelerometers are designed and fabricated.更多还原