【作者】 蔡洁； 廖小平； 朱健；

【Author】 Cai Jie Liao Xiaoping Zhu JianKey Laboratory of MEMS Ministry of Education, Southeast University, Nanjing, 210096 Nanjing Electronic Devices Institute, Nanjing, 210016

【机构】 东南大学MEMS教育部重点实验室； 南京电子器件研究所；

【摘要】 介绍了一种带直流驱动电极交直流分离的MEMS开关,研究了影响开关阈值电压的因素,运用缩腰设计、尺寸优化等方法降低开关的阈值电压,并将这种平膜开关与其他几种结构的膜开关进行比较。使用Coventor和HFSS软件模拟,设计的开关阈值电压小于20V,在Ku波段插入损耗低于0.1dB,反射损耗低于-25dB,谐振点隔离度高于40dB。更多还原

【Abstract】 This paper presented a DC and AC separated MEMS switch, and discussed its pull -in voltage. Low its voltage by reducing the width of its signal line under the membrane so as to allow its actuation pads close to the center, then compared some kinds of switches. Simulated by coventor and HFSS, the switch results in a pull -in voltage less than 20V, insertion loss less than 0. 1dB, return loss less than - 25dB and isolation better than 40dB at Ku band.更多还原