【作者】 陈绍凤； 赵湛； 秦宁； 陈贤祥；

【Author】 Chen Shaofeng Zhao Zhan Qin Ning Chen XianxiangState key Laboratory of Transducer Technology, Institute of Electronics,Chinese Academy of Sciences, Beijing, 100080

【机构】 中国科学院电子学研究所传感技术国家重点实验室；

【摘要】 论述了一种用于生化微系统中药物释放的系统,即气囊驱动微量药物输送执行嚣,通过此驱动系统可以达到局部输送药物的目的。利用微针阵列实行局部定时地释放药物、控制药量,微针阵列的研制是微驱动器的关键。执行器的微针部分采用硅-氮化硅-硼硅玻璃-金属(钛、镍、金)材料,利用MEMS技术研制,驱动部分利用硅-PDMS材料作气囊,主要介绍了微针的结构和气囊制作的工艺技术。气囊驱动的微执行器为生化微系统研究提供了一个技术方案,为实现局部定时释放药物、控制药量提供了可行的手段和方法。更多还原

【Abstract】 A drug delivery micro needle array used in biochemistry micro system was described. The system was achieved by a silicon micro needle array actuator driven by a micro gas chamber. The drug can be transported locally in micro dose with the micro driver system. Micro needle arrays, a key part of the micro driver system, were used to release the drug at the sickness focus. Micro gas chamber driver was another key technology,it provides the means for micro dose analysis. The micro needle arrays were fabricated with metals such as Titanium, nickel and gold by using MEMS fabrication technology. The micro gas chamber driver was made with silicon and PDMS. The process technology for fabricating the micro needle arrays and the micro gas chamber were simply described.更多还原