【作者】 罗怡； 刘冲； 刘军山； 徐敏；

【Author】 Luo Yi Liu Chong Liu Junshan Xu MinKey Lab for Precision and Non -traditional Machining Technology of Ministry of Education, Dalian University of Technology. Dalian, 116024

【机构】 大连理工大学精密与特种加工教育部重点实验室；

【摘要】 研究了一种集成Pt电极的安培型电化学微流控芯片的制备方法。在清洗后的SODA-LIME玻璃上涂敷正性光刘胶光刻,显影后开窗于微电极图形部分,利用射频溅射台溅射Pt后,采用剥离的方法得到Pt微电极。在另一玻璃基片上采用湿法腐蚀的方法得到微通道。微电极与微通道出口的对准工艺在自行研制的立体显微镜下完成,对准后的芯片在马弗炉中热键合,获得集成Pt电极的玻璃电化学微流控芯片。更多还原

【Abstract】 Using sputter and lift -off method to fabricate electrochemical microfluidic chip which integrated Pt micro electrode was presented. Coating positive photoresist on SODA -LIMA glass, after exposure and develop, sputter Pt on patterned glass, then using lift - off method to get Pt micro electrode. Using wet etching method to get mi-crochannel on another glass substrate. Align micro electrode and micro channel on different glass substrate was carried out on homemade 3D microscope. The aligned two glasses were put into Muffle furnace to thermal bonding and get the Pt electrochemical microfluidic chip.更多还原