【作者】 王明； 吴昌哲； 宋涛；

【Author】 Wang Ming Wu Changzhe Song Tao Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, 100080

【机构】 中国科学院电工研究所；

【摘要】 对基于巨磁电阻(GMR)效应的生物分子识别器件的结构和微加工,以及检测原理、检测方法进行了介绍,构建了对应于这种生物分子识别器件的信号检测和处理系统。采用微细加工的方法制成了基于巨磁电阻(GMR)效应的生物分子识别器件,生物分子识别器件的结构是多个磁隧道姑组成的传感器阵列,单个磁隧道结尺寸为10μm×20μm,退火后磁阻效应可达86.5‰,检测灵敏度可达8×10-4A/m,采用厚度小于100nm的PDMS作为器件的生物适应层,可将检测信号提高27倍以上。基于巨磁电阻(GMR)效应的生物分子识别器件主要应用于基因分析、医学诊断、免疫分析和药物筛选等领域。更多还原

【Abstract】 The structure and microfabrication, the detecting theory and way of biomolecular recognition device based on giant magnetoresistance(GMR) effects were introduced, also the signal detecting and processing instrumentation was presented. Here the GMR biosensor was fabricated with magnetic tunnel junction (MTJ) material. The biomolecular recognition device contains an array of MTJ sensors, single MTJ sensor’s size is 10μmX20μm, tunneling magnetore-sistance ratio(TMR) is 86. 5‰, detecting sensitivity of this system is about 8×10-4A/m. Bioadaptation layer of this device was fabricated with PDMS whose thickness is less than 100nm.更多还原