【作者】 陈立国； 孙立宁； 荣伟彬； 谢晖；

【Author】 Chen Liguo Sun Lining Rong Weibin Xie Hui Harbin Institute of Technology, Harbin,150001

【机构】 哈尔滨工业大学；

【摘要】 在分析微装配特点的基础上,讨论了微装配系统的功能需求和组成。提出了一种新型MEMS器件微装配系统设计方案,描述了系统样机关键技术模块的研制方案。以微型光谱分析仪极板对准为示范目标开展了实验研究,结果表明该系统适用于典型MEMS芯片的微对准和封装研究。更多还原

【Abstract】 Based on the analyses of micro-assembly tasks, the function needed for micro-assembly system was discussed. A new micro-assembly system was designed, and the key modules were described in detail. The system was used to complete the micro-alignment and felt of micro spectral analysis chips. Experiments show that the system is useful in micro-assembly of typical MEMS chips.更多还原