【作者】 杭观荣； 王振龙； 赵万生；

【Author】 Hang Guanrong, Wang Zhenlong, Zhao Wansheng School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001

【机构】 哈尔滨工业大学机电工程学院；

【摘要】 MEMS技术的发展和市场的呼唤促进了微型动力系统的发展,本文对基于MEMS技术的微型涡轮推进器和三种微型化学推进器(固体微型化学推进器、液体微型化学推进器和冷气微型推进器)的工作原理、研究现状和制作工艺等进行了分析。这些微型动力系统采用燃料或者推进剂作为能量来源,主要能用于传统动力系统无法胜任的场合。微型动力系统与其它微型致动器配合,将推动MEMS产品的实用化和普及化。更多还原

【Abstract】 Micro power system is impelled by the development of MEMS and the demanding of market. This paper discusses the operating principles, researches and the brief manufacturing processes of the micro gas turbine engine and three type of chemical propellant microthrusters(solid propellant microthruster, liquid propellant microthruster and cold-gas microthruster). These micro power systems, mainly serve in the occasions which traditional power systems can’t serve, are based on fuel and propellant as the energy sources. Micro power system, together with other micro actuators, will popularize MEMS products.更多还原