【作者】 姜传海； 陈世朴； 徐祖耀；

【Author】 JIANG Chuan-hai,CHEN Shi-pu,XU Zu-yao (T. Y. Hsu)(School of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200030,China)

【机构】 上海交通大学材料科学与工程学院；

【摘要】 基于不对称布拉格反射理论,介绍了薄膜材料二维X射线衍射分析方法,并对铝合金表面的TiN薄膜进行了分层掠射分析,证实了该分析方法的可行性。结合掠射、侧倾、内标及交相关函数定峰等技术,改进了常规X射线应力测量方法,测量了上述薄膜中的内应力,表明可显著提高内应力测量精度。更多还原

【Abstract】 Based on the non-symmetrical diffraction theory,a two-dimensional X-ray diffraction technique is presented in the present paper.The depth profile of the phases existing in a TiN film deposited on Al alloy substrate was analysed by using the glancing method,indicating the feasibility of the proposed technique The conventional X-ray diffraction method is improved in combination with glance incidence,side-inclination,internal standard and cross correlation function.It has been employed to the determination of internal stress in thin films and the results show an enhanced measuring accuracy.更多还原