【作者】 杨虹； 支凌云； 李言荣；

【Author】 YANG Hong , Zhi Lingyun , Li Yanrong (School of Electronics engingeering, Chongqing University of Posts and Telecommunication, Chongqing, China, 400065 School of Microelectronics and SolidState Electronics, University of Electronic Science and Technology of China, Chengdu 610054,China;)

【机构】 重庆邮电学院 光电工程学院； 电子科技大学 微电子学与固体电子学院；

【摘要】 根据半导体材料电阻率随温度变化的性质研究硅温度传感器的温敏特性,给出其基本结构和制造工艺,并对硅温度传感器的电阻-温度特性、灵敏度及工作电流进行了分析,并制作出硅温度传感器样品。更多还原

【Abstract】 According to the characteristic of semiconductor resistance rate changing along with temperature, the temperature-sensitive characteristic of the temperature sensor based on silicon material is studied in this paper. And we introduce its basic structure and manufacture technique and analyze its sensitivity, work current and relationship between resistance and temperature. And the sample is implemented更多还原