【作者】 刘宏欣； 张军； 梁静秋； 卢锷； 陈星旦；

【Author】 LIU Hong-xin, ZHANG Jun, LIANG Jing-qiu , LU E , CHEN Xing-dan Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China Department of Elcetro-Optical Engineering, Institute of Technology, Jinan University, Guangzhou 510632, China

【机构】 中国科学院长春精密机械与物理研究所； 暨南大学理工学院光电工程系；

【摘要】 光谱仪作为种类繁多、应用广泛的一类重要测试仪器,随着微光机电系统和微加工技术的发展,其微型化趋势日益明显。文章首先介绍了几种基于不同分光类型的微小型光谱仪的特点和发展情况,随后介绍并计算了基于麦克尔逊干涉仪的微型傅里叶光谱仪-静态傅里叶光谱仪的结构。静态傅里叶光谱仪的波段范围由所采用的探测器决定,一般在近红外和可见光区,该光谱仪的主要特点是结构紧凑、无移动部分和成像系统。最后文中指出微型化是光谱仪器的一个重要发展方向。更多还原

【Abstract】 The micro-sized spectrometers have become attractive because of the new applications and expanding opportunities in a variety of industries in recent years. Miniaturized instruments and sensors can be smaller, cheaper and faster. The development of different kinds of micro-sized spectrometers was introduced in the present paper. And then the configuration of a micro-sized Fourier transform spectrometer based on Michesson interferometer was calculated The spectrum of this stationary Fourier transform spectrometer is in the near-infrared and visible light wave band because of the restricted detectors. The merit of this kind of spectrometer is compactness without moving parts and imaging system.更多还原