【作者】 陈贵锋； 刘丽丽； 李养贤； 李兴华； 蔡莉莉； 宋守丽； 李永章； 陈东风；

【Author】 CHEN Gui-feng, LIU Li-li, LI Yang-xian , LI Xing-hua, CAI Li-li, SONG Shou-li, LI Yong-zhang, CHEN Dong-feng School of Material Science and Engineering, Hebci University of Technology, Tianjin 300130, China Shijiazhuang Pharma. Weisheng Pharmaceutical(Shijiazhuang) Co. Ltd. , Shijiazhuang 050035, China China Institute of Atomic Energy, Beijing 102413, China

【机构】 河南工业大学材料学院； 石药集团维生药业石家庄有限公司； 中国原子能科学院；

【摘要】 研究了快速热处理(RTP)对快中子辐照掺氮直拉硅中氧沉淀的作用,对不同辐照剂量的样品先进行的不同温度和降温速率的RTP,再将其与没有经历RTP的样品放入单管扩散炉中进行1 100℃高温20 h 一步退火,保护气氛为氩气。利用常温傅里叶红外变换方法测量样品的间隙氧含量。利用低温傅里叶红外变换方法研究样品中的氧沉淀,光学显微镜用来观察样品体内的缺陷形貌。实验发现,RTP不能改变氧沉淀进程,但是低的降温速率有助于氮氧复合体及片状氧沉淀的生成。RTP温度越高,缺陷密度越低,清洁区越宽。更多还原

【Abstract】 The effects of rapid thermal process (RTF) on oxygen precipitation in fast-neutron irradiated nitrogen-doped Czochralski silicon (NCZ-Si) were studied. Samples irradiated with fast-neutron and annealed at 1 100 ℃ for 20 h after anneal in quick anneal oven at different temperature and cooling rate in Ar. Fourier transform infrared absorption spectrometer (FTIR) was used to detect interstitial oxygen ([Oi]) concentration and the configuration of oxygen precipitation. Defects were observed using optical microscope. It was found that RTP couldn’t change the course of oxygen precipitation, but low cooling rate increases the formation of nitrogen-oxygen (NO) complexes and lamellar oxygen precipitation. Along with increasing the RTP temperature, defects density decreased and denuded zone (DZ) width increased.更多还原