【作者】 李成章； 黄庆安；

【Author】 LI Cheng-zhang HUANG Qing-an (Key Laboratory of MEMS of Ministry of Education,Northeast University,Nanjing 210096,China)

【机构】 东南大学MEMS 教育部重点实验室；

【摘要】 给出了一种新型梳状微机械谐振式磁场传感器的设计。采用静电激励和静电检测,通过罗伦兹力的反馈将磁场的大小转变为频率输出。对结构模型进行简化,推导出了本征频率的计算公式并进行了 ANSYS 模拟。通过尺寸的设计,该传感器的灵敏度可以达到258 kHz/T。更多还原

【Abstract】 A novel magnetic field sensor based on the comb structure was proposed.Transfor- ming the output of frequency to the magnetic field through the feedback of Lorentz force,this de- vice was capacitively excited and the signal was capacitively detected.After simplifying the model of design,the expression of the frequency was got and the structure was simulated by ANSYS. High sensitivity of 258 kHz/T is achieved after optimizing parameters of the structure.更多还原