【作者】 严庆文； 魏益群； 李业隆； 沈美娥； 朱嘉林；

【Author】 YAN Qing-wen~1 WEI Yi-Qun~1 LI Ye-long~2 SHEN Mei-e~1 ZHU Jia-lin~1 (1.Beijing Information Technology Institute,Beijing 100101,China; 2.Beijing Technology and Business University,Beijing 100037,China)

【机构】 北京信息工程学院； 北京工商大学；

【摘要】 以声表面波中的陀螺效应为理论基础,通过数值计算获得了 LiNbO₃基底上声表面波波速随基底转动速率的变化,以此为依据设计了一种双通道声表面波转速敏感结构,制作出双通道声表面波转速传感器。通过实验,该传感器的分辨率为12 Hz/r·s^-1。更多还原

【Abstract】 The relationship between surface acoustic wave （SAW） propagating velocity and the rotating velocity of the LiNbO₃ substrate was obtained by calculating numerical value based on the SAW gyroscopic effect.A dual-channel delay line was designed according to the above calcula- tion,and the SAW rotation sensor was developed.The resolution of the SAW rotation sensor is 12 Hz/r·s^-1through the experiment.更多还原