【作者】 王昭； 李纪念； 朱升成；

【Author】 WANG Zhao LI Jinian ZHU Shengcheng(Institute of Mechanical Engineering, Xi’an Jiaotong University, 710049 Xi’an, China)

【机构】 西安交通大学机械工程学院；

【摘要】 三维表面微轮廓一直是工程领域很重要的测量信息,随着小型化趋势以及微机械、微动力、纳米技术的出现,共焦技术由于其具有高精度、非接触的测量能力而被引入三维轮廓测量系统。特别是在半导体制造业以及芯片加工中得到广泛的应用。本文主要针对工业用激光共焦扫描显微镜,给出了共焦显微技术的测量原理、性能以及其测量系统,实际建立了一针对表面微轮廓测量的反射式共焦实验系统。针对不同的实验系统参数进行了实验并给出了实验结果,为进一步的仪器化奠定了基础。更多还原

【Abstract】 The 3-D surface and their positions or surface topography are the very important information in engineering field all the time. With the advent of miniaturization and the emergence of micromechanics, microdynamics and nanotechnology, confocal microscopy was introduced in three dimensional measurements recently years because of its high precision, non-contact, and wide field. Especially it is used widely in the field of semiconductor and chip manufacture. This paper describes the principle, the characteristics and the system set up of confocal microscopy. It also gives the practical set up in the experiment which is designed for surface topography. A confocal scanning microscope in reflected mode was built in the Lab. The experiment results which obtained in different conditions are also presented.更多还原