【作者】 黄佐华； 吴雪忠； 何振江； 杨冠玲；

【Author】 HUANG Zuohua WU Xuezhong HE Zhenjiang YANG Guanling (Department of Physics, South China Normal Univ. Guangzhou 510631)

【机构】 华南师范大学物理系；

【摘要】 以C语言为开发工具,成功设计和编制一套椭偏测厚仪数据处理软件,它具有求解透明膜厚度、折射率和金属复折射率以及绘制(n,d)～(Ψ,?)列线图的功能。可以配合常规椭偏仪使用,扩展测量膜厚范围,提高测量和求解精度,增加实验内容。实验测试了硅衬底和玻璃衬底表面薄膜的厚度和折射率,并与国外仪器和文献比较,得到相近的结果。实验表明:本软件的求解结果是准确的和可靠的,求解膜厚和折射率精度分别达到0.01nm和0.001.更多还原

【Abstract】 With the help of the computer language of C,the data processing software for anellipsometer has been successfully designed.It has the function of calculating the thickness andrefractive index of film and the complex refractive index, and plots the the (n,d)～(Ψ,?)curves. The software can work for the use of common ellipsometer to strength the range of filmthickness, improve the measured precisions and increase contents of the experiments. The film onsilicon and glass are tested. The experimental results are consistent with the ones from the overseaellipsometer and the related reports. The experiments show the calculated results are accurate andreliable. The calculated precisions of the thickness and refractive index of film are 0.01nm and0.001 respectively.更多还原