【作者】 何玉琳； 章海军；

【Author】 HE Yulin,ZHANG Haijun State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027

【机构】 浙江大学现代光学仪器国家重点实验室；

【摘要】 本文简要介绍了以磁悬浮和气悬浮为代表的传统悬浮技术,分析了其局限性,提出了光电反馈式静电悬浮的新方法,说明了实时测距在静电悬浮中的重要性,解释了光学三角法和位置敏感器件的工作原理,并介绍了在此基础上研制的新型实时测距系统,给出了该系统的光路设计和后续处理电路设计。通过一个实验,绘制了该系统的输出电压曲线,测定了其灵敏度和工作范围等性能。结论表明,该系统结构简单,易于集成,且能够很好的满足静电悬浮系统对实时测距的要求。更多还原

【Abstract】 This article introduced briefly traditional suspension such as magnetic levitation and aerodynamiclevitation, analyzed their limits, presented novel method of electrostatic suspension based on opt-electronicfeedback control, emphasized the importance of real time measuring in electrostatic suspension. The principlesof optical triangle method and position sensitive device were explained, on the basis of which novel real timemeasuring system was developed giving optical path design and following processing circuit design. Throughan experiment, we drew the diagram of the system’s output voltage, which showed it had good performance insensitivity and available range. The result proved that this system had a simple structure, was easy to beintegrated, and could meet what electrostatic suspension system asked for real time measuring.更多还原