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飞秒激光对金膜烧蚀阈值的研究
Femtosecond Laser-induced Damage Threshold of gold film
【作者】 孙海轶; 徐至展; 贾天卿; 李哓溪; 李成斌; 冯东海; 徐世珍;
【Author】 SUN Haiyi, JIA Tianqing, XU Zhizhan, LI Xiaoxi, LI Chengbin, FENG Donghai, XU Shizhen Laboratory for High Intensity Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, 201800
【机构】 中科院上海光学精密机械研究所强光光学实验室;
【摘要】 金反射膜是许多光学器件和光学实验中的关键薄膜元件,其破坏阈值的高低直接影响到器件的运转和实验的顺利进行。因而,研究激光作用下材料的破坏阈值很有必要。实验利用800nm飞秒激光对金膜进行了表面烧蚀研究,用光学显微镜测量了不同脉宽(45~800fs)下材料的烧蚀斑面积,并由此计算出材料的烧蚀阈值。结果发现,金膜在飞秒激光作用下的烧蚀形貌表现为孔洞,没有明显的熔化痕迹,与长脉冲激光烧蚀的形貌不同。金膜的烧蚀阈值很低,大约在0.15J/cm2左右,比1053nm皮秒(100ps)激光作用下的烧蚀阈值低3.3倍,且与脉宽(45~800fs)的依赖型不强。
【Abstract】 As a reflecting coating, gold film is a critical part in many optic devices and experiments. In these applications, its damage threshold is a very important parameter, so it is necessary to measure it. The laser damage studies performed at 800nm for pulse durations of 45-800fs on gold film are presented. Ablated areas were measured by optic microscopy, aiming at calculating damage threshold. Our results demonstrate that the damage morphology is holes, and negligible melting or collateral damage was observed, which is different by contrast with long pulse laser. The damage threshold of gold film is about 0.15J/cm2, which is 3.3 times lower than that of 100-ps 1053-nm laser, and nearly independent of pulse width ranging from 45fs to 800fs.
- 【会议录名称】 大珩先生九十华诞文集暨中国光学学会2004年学术大会论文集
- 【会议名称】中国光学学会2004年学术大会
- 【会议时间】2004
- 【会议地点】中国杭州
- 【分类号】TN249
- 【主办单位】中国光学学会