【作者】 蔡晓； 左玉华； 王启明；

【Author】 CAI Xiao ZUO Yuhua WANG QimingState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences Beiging 100083, China

【机构】 中国科学院半导体研究所集成光电子学国家重点实验室；

【摘要】 制作了一种平顶响应的热光可调谐滤波器,通过用湿法腐蚀方法将半波长的共振腔分成具有不同光学厚度的两个部分,并且使入射光照射到两个部分的面积基本上相等,来实现平顶响应特性。对该滤波器的输出响应进行检测,所得到的实验结果与理论模拟相符合,相对透射率的极大值与极小值之间的起伏度小于0.01。与实现平顶响应的其他方法相比,本文滤波器器件的制作工艺简单,平顶性能优越,容易与其他有源和无源光子器件集成。本文还给出了通过制作几十微米量级的共振腔来实现平顶窄带响应的热光可调谐滤波器的机理,这种滤波器输出响应的起伏度小于0.02,3dB带宽小于1纳米。更多还原

【Abstract】 A thermo-optical tunable filter of flat-top response is successfully prepared. Characteristic of flat-top response is obtained by dividing half-wave resonant cavity into two parts having different thickness through wet corrosion method, and making the area of the two parts irradiated by incident light substantially equal. The output response of the filter is measured, and all the experiment results are consistent with the theoretical analyses. The difference of the maximum relative transmittance and the minimum one is less than 0.01. Compared with other methods of obtaining flat-top response, the method in this paper is advantageous in its simpler manufacturing process, more optimal of performance, and facility to integrate with other devices. Moreover, in this paper, the mechanism of obtaining narrow-band thermo-optical tunable filter of flat-top response by using a resonant cavity of scores of micrometers is proposed. The fluctuation of that filter is less than 0.02, and the bandwidth is less than 1nm .更多还原