【作者】 范镝； 郑立功； 张忠玉； 张峰； 牛海燕； 张学军；

【Author】 Fan Di, Zheng Li-gong, Zhang Zhong-yu, Zhang Feng, Niu Hai-yan, Zhang Xue-jun ( Optical Technology Research Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun,130022, China )

【机构】 中国科学院长春光机与物理研究所光学技术中心；

【摘要】 本文介绍了480mmⅹ280mm的船形碳化硅平面反射镜数控研磨的工艺参数的确定和工艺流程;并介绍了在研磨过程中的使用的机床、磨具、磨料及采用的工艺参数和检测方法。给出了研磨前后480mmⅹ280mm的船形碳化硅平面反射镜面形精度和表面粗糙度的检测结果:面形精度峰谷值(PV)由初始的21.7微米收敛到4.62微米,均方根值(RMS)由3.70微米收敛到0.558微米,并把轮廓检测结果与干涉检测结果进行了比较。更多还原

【Abstract】 Computer controlled grinding and testing process of 480mm ⅹ 280mm planetary silicon carbide(SiC) mirror are mentioned. The machine, tools, abrasives, technique and testing method used in the grinding and testing process are introduced, respectively. Also some profiler testing results of surface figure are given. It’s showed that the surface figure peak-village and root-mean-square are reduced from 21.7μm and 3.70μm to 4.62μm and 0.558μm, respectively. And the interferometric result are also showed.更多还原