【作者】 张蓉竹； 许乔； 杨春林； 蔡邦维；

【Author】 ZHANG Rongzhu1 XU Qiao2 YANG Chunlin2 CAI Bangwei1 (1. Optoelectronics Dept., Sichuan Univ., Chengdu, 610064 2. Chengdu fine optical engineering research center, Chengdu, 610041)

【机构】 四川大学电子信息学院光电系； 成都精密光学工程研究中心；

【摘要】 为了满足我国ICF系统大口径光学元件的检测需要,提出了子孔径拼接干涉检测的方法。介绍了子孔径拼接的基本原理,利用最小二乘法分析了拼接参数的求解方法,另外还使用了统计及线性回归理论分析了子孔径拼接系统的精度,从理论上证明了子孔径拼接技术在实际检测中的可行性。在理论分析的基础上,根据具体要求和实际条件,进行了实验装置的方案设计,并利用自行设计加工的实验装置进行了具体的子孔径拼接检测实验,得到了较好的实验结果。更多还原

【Abstract】 To meet the requirement of the specification of the large aperture component in ICF system, the sub-aperture stitching interferometer is introduced. The basic theory of the stitching technology has been discussed and the stitching parameter has been worked out by using the least-square method. Furthermore the regressive analyzing method has been used in discussing the stitching accuracy, which is the guarantee of the actual application of the stitching system. According to the theoretical results, the experiment device has been designed and fabricated. With the experiment device the stitching experiments have been done, and the results show that this testing method is suitable for the large aperture optical component test.更多还原