【作者】 何瑾； 左保军； 范志刚； 李宏； 董密林； 邱俊文； 桂兵； 徐红；

【Author】 HE Jin, ZUO Bao-jun, FAN Zhi-gang, LI Hong(Department of Automation Measurement and Control Engineering, HIT, Harbin, Heilongjian 150001, China)DONG Mi-lin, QIU Jun-wen, GUI Bing, XU Hong(The Aerodynamic Academy of Chinese Aviation Industry, Harbin, Heilongjiang 150001, China)

【机构】 哈尔滨工业大学测控系； 中国航空工业空气动力研究院；

【摘要】 采用全息透镜作为分光元件,利用其±1级衍射汇聚(发散)光束的焦点在菲涅耳近似条件下不随入射光的线位移而移动的原理,将线位移和角位移的测量分开。利用两片高精度的位置敏感探测器(PSD)(面阵),准直He-Ne激光束为基准,采用互相垂直的布局,实现了目标靶的四自由度实时测量。结构合理,测试头体积小、重量轻,便于安装;测量精度高,角位移的分辨力为1″,线位移分辨力为1μm。该系统亦适用于诸如机床导轨、大尺寸零件安装等多自由度的准直和微小偏移量的测量。更多还原

【Abstract】 In this system, a holographic lens was used as splitter. As the focus spot of the ± 1 degree diffracted convergent (divergent) beams did not move with the linear movement of the incident beam under the Fresnel approximate conditions, the measurements of linear displacement and angle displacement were separated. Two PSD (Position Sensitive Detector) were used as detectors, and He-Ne laser beam was used as datum. Then four degree-of-freedom measurement of the target could be finished. The configuration design is reasonable. The volume of testing head is small. The weight is light, and it’s convenient to be fixed. The measuring precision is high. The experiments prove that the stabilization of linear shift can reach 1μm, and angle shift can reach 1". The system can be used to collimate other devices with multi degree-of- freedom and measure the minute shifts, such as the guide rail of machine tool and the assembling of large parts and so on.更多还原