【作者】 汤宝寅； 王浪平； 王小峰； 于永澔； 刘洪喜；

【Author】 TANG Bao-yin, WANG Lang-ping, WANG Xiao-feng, YU Yong-hao, LIU Ho-xi (State key Lab. of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001)

【机构】 哈尔滨工业大学现代焊接生产技术国家重点实验室；

【摘要】 束线离子注入被广泛用于轴承内外圈滚道与滚珠表面强化处理,以提高轴承的抗磨损、抗疲劳、抗腐蚀能力。但是由于束线离子注入固有的直射性限制,无法使轴承内外圈滚道获得均匀离子注入。为此,本文提出了一种新的离子注入处理方法-全方位离子注入技术。从理论分析、全方位离子注入过程数值模拟,到实验研究,结果都表明适当地降低注入电压、采用高密度、窄脉冲的全方位离子注入技术,可大大提高轴承内、外圈滚道表面注入剂量均匀性,并可实现对轴承内、外圈滚道表面及轴承滚珠的批量处理。更多还原

【Abstract】 Ion beam ion implantation was widely used for surface modification of bearings to increase their abilities of wear resistances, corrosion resistances and fatigue resistances. Because of its line-of-sight nature, inner and outer races of bearings could not achieve uniform ion implantation in the processing process. For that, a new ion implantation technique-plasma immersion ion implantation is presented in this paper. Theoretical analyses, mathematical value simulation of the plasma immersion ion implantation process, and experimental research prove that the implantation dose uniformity of inner and outer races of bearings can be obviously increased by means of lower implantation voltage, higher plasma density and narrower implantation pulse duration, and inner and outer races of bearings and rolling balls can be treated in a batch process.更多还原