【作者】 兰怀迎； 曲鲁； 刘建同； 刘文利； 李蕾；

【Author】 LAN Huai-ying, QU Lu, LIU Jian-tong, LIU Wen-li, LI Lei(Ji’nan Inst. of Semiconductors, Ji’nan 250012, China; Dept. of Maths. and Physics, Shandong Univ. , Ji’nan 250061, China)

【机构】 济南半导体研究所； 山东大学数理系；

【摘要】 通过对粉末溅射SnO2/CeO2薄膜气敏元件性能的测试和探讨,总结出反应升温△trea与气体浓度C存在关系△trea=(ACn)/(1+BCm)(其中A,B>0,n>m>0),同时发现:湿度对灵敏度的影响很大而对相对灵敏度影响不大;为确保测量的可靠性应避免用于测量高浓度气体,同时注意稳定测试电压,如用相对灵敏度进行测量,则可以减小湿度对测量结果(测量值)的干扰.更多还原

【Abstract】 Through measuring and study on powder-sputtered SnO2/CeO2 thin film gas sensor, the relationship of the reaction temperature Δtrea increment and gas concentration C is Δtrea=(ACn)/(1+BOm), where A, B >0. n>m>0. It has been found that the humidity has great effect on gas sensitivity, but has small effect on relative gas sensitivity. To guarantee the reliability of measuring, the high concentration of gas should not be used, and should stabilize the testing voltage. The interference of humidity on measuring result can be decreased by testing relative sensitivity.更多还原