【作者】 余厚云； 杨明； 赵转萍；

【Author】 Yu Houyun~(1,2) Yang Ming~1 Zhao Zhuanping~1 (1 Nanjing University of Aeronautics & Astronautics,Nanjing 210016,China; 2 Southeast University,Nanjing 210096,China)

【机构】 南京航空航天大学机电学院； 东南大学仪器科学与工程学院；

【摘要】 针对计量测试领域中小尺寸测量这一难点,设计并研制出一套显微视觉测量系统,完成对微型零件几何量的测量。以半导体芯片导线线宽测量为例,介绍了光学系统的设计,给出了显微测量系统的硬件组成。采用类判别分析法选取阈值完成图像分割,并通过对标准件的测量实现了显微测量系统的标定。最后,给出了芯片导线线宽的测量结果,理论计算及实验结果表明,该系统具有较高的测量精度,为微型零件的检测提供了有用的工具。更多还原

【Abstract】 A set of micro-measuring system based on machine vision is developed for the measurement for mini-size parts,as generally considered difficult in the metrologies.Detailed introduction for the design of the optic system and hardware components are given with the example for measuring the width of circuits on the semiconductor chips.Otsu method is applied in the threshold selection for image segmentation.The system is calibrated by the measurement for a standard piece.Theoretic calculation and experimental results indicate that the system has a high precision and provides a useful instrument for the inspection of mini-size parts.更多还原