【作者】 王乐妍； 刘超； 章海军；

【Author】 Wang Leyan Liu Chao Zhang Haijun (State Key Laboratory of Modern Optical Instruments,Zhejiang University,Hangzhou 310027,China)

【机构】 浙江大学现代光学仪器国家重点实验室；

【摘要】 本文利用 KrF 准分子激光器(248nm)进行了微机构加工的研究。准分子激光属于紫外波段激光,具有很高的光子能量,当作用于材料表面时,材料因吸收的光子能量超过自身结合键能而产生化学键的断裂,从而在表面形成刻蚀。基于上述原理的准分子激光微加工方法成本较低,加工速度快,分辨率高,尤其适合各种高聚物材料的加工。本文利用准分子激光器对所选的多种高聚物材料进行了刻写实验,并对加工重复频率、激光光斑直径等加工参数的选择进行了探讨;在此研究基础上加工制备出了组合臂式微型光热驱动器,并采用650nm,10mW 激光器作为驱动源,对所制备的微型光热驱动器进行了驱动实验。研究表明,利用准分子激光微加工方法制得的微结构边缘整洁,具有较高分辨率;微型光热驱动器实例结构简单,性能优越,可应用于光开关等 MEMS 零件。更多还原

【Abstract】 In this paper,we research the microstructure manufacture using KrF excimer laser(248 nm). Since the excimer laser works at the ultraviolet band,it has very high photon energy,which is higher than the bonding energy of most polymeric materials.When the laser irradiates on the material surface,the ma- terial will have chemical band rupture because of the absorption of photon energy.And therefore there will be traces formed on the material surface.Excimer laser microprocessing based on the above principle has a low cost and a rapid processing speed.It can achieve a high resolution and is especially fit for the processing of high polymers.In this paper,we etch various polymeric materials using the excimer laser,and discuss a- bout the proper manufacture parameters,such as repetition frequency,and the diameter of laser spot.Based on these research findings,we fabricate a combination-arm microactuator by the excimer laser microprocess- ing,and complete the photo-thermal driving experiments for the microactuator.The driving power is pro- vided by a 650 nm laser,which works at 10 mW.According to the research results,the microstructures fabricated by the excimer laser microprocessing are smooth on their edges,and have high resolution.The photothermal microactuator has a simple structure,and is incidental to fabricate.It can be used as a light controlling commutation or other elements of MEMS.更多还原