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基于CCD的摆动扫描镜摆幅光电测量系统研究

Research on photoelectric measurement system of range of oscillation of scanning mirror based on CCD

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【作者】 徐熙平苏拾张国玉张宁

【Author】 Xu Xiping Su Shi Zhang Guoyu Zhang Ning (Changchun University of Science and Technology,Changchun 130022,China)

【机构】 长春理工大学

【摘要】 为解决摆动扫描式红外地球敏感器扫描镜摆幅实时动态非接触测试问题,本文采用基线阵 CCD 传感器件的光电检测技术,提出一种扫描镜摆幅激光动态测试方法,可实现扫描镜的摆动角度、摆动频率等参数的动态非接触测量。文中对摆动扫描镜摆幅动态测量理论进行了详细分析与探讨,设计了系统的组成和总体结构,通过建立系统的数学模型,解决了测量数据处理与误差修正问题,对测量系统的精度进行了实验测试。结果表明,系统的摆角测量范围为0~±12°,测量精度优于±0.05°,该动态摆幅测量方法是切实可行的。

【Abstract】 In order to resolve real-time dynamic non-contact measurement in range of oscillation of scanning mirror of earth infrared sensitivity device,we adopted photoelectric testing technology that based on linear array CCD sensor,presented laser dynamic measue ment method which can measured range of oscillation, angle and frequency of oscillation of scanning mirror as well as other related parameters were achieved by dynamic non-contact measurement.In this paper,we particularly analyzed and discussed the dynamic measurement theory of range of oscillation,and designed the component and general structure of the sys- tem.The problems of data processing and error correction were resolved by establishing mathematic mod- el.Finally,the measurement accuracy of the system was verified by the experiment.Tthe results indicate the measurement range of tilt angle is 0~±12°,the measurement accuracy is excelled±0.05°,so this dy- namic measurement method is feasible.

  • 【会议录名称】 2007’中国仪器仪表与测控技术交流大会论文集(二)
  • 【会议名称】2007’中国仪器仪表与测控技术交流大会
  • 【会议时间】2007-06
  • 【会议地点】中国四川成都
  • 【分类号】TP722
  • 【主办单位】《仪器仪表学报》杂志社、中国仪器仪表学会、电子科技大学、《电子测量技术》、《国外电子测量技术》
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