【作者】 邵宏伟； 方占军； 孟飞； 王强； 张行； 刘香斌； 邹玲丁； 沈雪萍；

【Author】 Shao Hongwei Fang Zhanjun Meng Fei Wang Qiang Zhang Hang Liu Xiangbin Zhou Lingding Shen Xueping (National Institute of Metrology,Beijing 100013,China)

【机构】 中国计量科学研究院；

【摘要】 可调谐外腔半导体激光（ECDL）的线宽小于100kHz,干涉相干距离约为3000m,波长可连续调节范围超过 100nm。应用上述二项特性,改变可调外腔半导体激光波长（频率）可测得任意点到仪器的绝对距离。通过飞秒激光可将其量值溯源至绝种,在量块测量中,它可替代633nm、612nm、543nm 三支氦氖激光器对一等量块(0.02μm+10^-6L)进行小数重合法测量,且无需对被测量块进行预测。可调谐外腔半导体激光亦可对工件进行长距离无导轨测量,其测量距离可大于 100m,分辨率优于3nm,不确定度可以达到2.5×10^-6L,测量精确度将优于传统的激光测距仪。通过对可调谐外腔半导体激光的应用研究,可对高精度绝对测量提供相关的新技术及新思路。更多还原

【Abstract】 Tunable external cavity diode laser（ECDL）can be continuously tuned over 100 nm,at the same time shows great wavelength selectivity with a possible linewidth of less than 100 kHz,which corresponds to a coherent distance about 3 000 m.These two characteristics enable a wavelength-tuning for absolute distance calibration and measurement.In principle,a tunable external cavity diode laser can replace the three He-Ne lasers of 633 nm,612 nm,543 nm.In the traditional exact fraction method for the first grade gauge block calibration,and avoid the necessity of a coarse measurement of the gauge block in advance. The tunable external cavity diode laser can also be used in the absolute long distance measurement with a measuring range above f 100 m,a resolution and uncertainty up to 3nm and 2.5×10^-6L respectively.更多还原