【作者】 李长荣； 杜振民； 卢琳； 张维敬；

【Author】 LI Changrong DU Zhenmin LU lin ZHANG Weijing (University of Science and Technology Beijing,Beijing 100083,P.R.China)

【机构】 北京科技大学材料科学与工程学院；

【摘要】 外延生长技术是半导体材料和器件制造的重要工艺,特别是液相外延(LPE)和金属有机物气相外延(MOVPE)技术得到了尤其广泛的应用。本文在分析LPE和MOVPE外延生长技术的工艺特点和薄膜特性的基础上,重点从热力学相平衡的角度,研究适合于半导体生长的成分空间。对比分析结果表明:LPE和MOVPE外延技术具有一些共同的优点和特点,而在另一方面它们又可以取长补短、互为补充。更多还原

【Abstract】 The epitaxial techniques are the most important processes in the production of semiconductor materials and optoelectronic devices. Liquid Phase Epitaxy(LPE)and Metal-Organic Vapor-Phase Epitaxy(MOVPE)particularly found many applications. A brief look at the process characteristics and crystalline properties of both LPE and MOVPE techniques begins the paper. Next follows the main portion that discusses the compositional spaces suitable for LPE and MOVPE growth from the view point of thermodynamic equilibrium. The analysis and comparison show that on the one hand LPE and MOVPE have some advantages and characteristics in common;on the other hand,they may overcome each other’s weaknesses and deficiencies by offering their own special features.更多还原