【作者】 申中华； 李勇；

【Author】 Shen Zhonghua Li Yong Wuhan Research Institute of Posts and Telecommunications,Wuhan 430074,China

【机构】 武汉邮电科学研究院；

【摘要】 本文提出一种新的微镜静电驱动方法,即双极脉宽调制(BPWM)+镜片闭环控制方式。首先介绍了 MOEMS 光开关实现方案及 PWM 驱动方式概述。重点阐述了双极脉宽调制(BPWM)+镜片闭环控制方式的实现方法,并比较了与通常的 D/A+高压运放方式的优势所在,提高了镜片的倾斜精度,用镜片闭环控制方式解决了可靠性的问题。更多还原

【Abstract】 the noval driving method,BPWM and the way of dosed cycle control,is presented.In first,the project in MOEMS optical switch is introduced and the summarize of PWM is also illustrated.then the BPWM and the way of closed cycle control are particular illustrated.and compared with the common D/A high-voltage drive amplifier,there are some advantages,at the same time,the precision of micromirror gradient angle is improved,the problem of reliability is solved by the way of closed cycle control.更多还原