【作者】 逄显娟； 石雷； 王鹏； 张广安； 张俊彦； 刘维民；

【Author】 Pang Xianjuan~(1,2) Shi Lei~1 Wang Peng~1 Zhang Guangan~3 Zhang Junyan~1 Liu Weimin~1 1.State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physical,Chinese Academy of Science,Lanzhou 730000,China; 2.Graduate School of The Chinese Academy of Science,Beijing 100039,China; 3.Lanzhou University,Lanzhou 730000,China

【机构】 中国科学院兰州化学物理研究所固体润滑国家重点实验室； 兰州大学；

【摘要】 利用磁控溅射技术在 p(100)型单晶硅表面制备了 Ti、Al 掺杂类金刚石碳薄膜。采用 X 射线光电子能谱和原子力显微镜等研究了薄膜的微观结构和表面形貌,在 UMT-2MT 型摩擦磨损试验机上考察了薄膜在不同频率(滑动速度)下的摩擦学性能。结果表明：所制备的薄膜均匀、致密,表面光滑平整,与基底结合力较高；薄膜与钢球对摩时显示出良好的抗磨减摩性能：随着试验频率的提高,薄膜的摩擦系数降低,耐磨寿命降低；薄膜的减摩抗磨性能同其在钢球偶件磨损表面形成的转移膜相关。更多还原

【Abstract】 Ti and Al-doped diamond-like carbon films were deposited on Si substrates by magnetron sputtering.The microstructure and morphology of the DLC film were investigated by means of X-ray photoelectron spectroscopy and atomic force microscopy.The friction and wear behaviors of the DLC film sliding against a steel hall at different velocities were examined on a UMT-2MT test system.The morphologies of the wear scar of the film and of the counterpart steel ball were observed on a scanning electron microscope.It was found that the film was very much smooth and compact.It showed good anti-wear properties as sliding against a steel ball,while the applied sliding velocity had great effects on the friction and wear behaviors of the DLC films.Moreover,the friction and wear behaviors of the DLC film was also dependent on its transfer film formed on the worn surface of the counterpart steel ball.更多还原