【作者】 丁建宁； 石超燕； 李夜平；

【Author】 DING Jian-ning SHI Chao-yan, LI Ye-ping (Micro/Nano Science & Technology Center, Jiangsu University, Zhenjiang 212013, China)

【机构】 江苏大学微纳米科学技术中心；

【摘要】 成功地制备了两种带不同官能团的硅烷偶联剂纳米级分子自组装膜,并对膜进行了XPS和AFM的表征。根据XPS 谱图中各元素峰值可知采用两种偶联剂均能在硅基片上制备均匀的纳米级薄膜。元素含量表数据可以得出,乙氧基水解速率较甲氧基快。通过AFM表征对微观颗粒大小、多少、分布均匀性进行对比分析,结果进一步验证了该理论。将带氨基的硅烷偶联剂膜在220℃真空条件下热处理1h,对比分析处理前后形貌图与相图,认为该膜具有了一定的稳定性。更多还原

【Abstract】 The nanosacle silane coupling agent self-assembled monolayers (SAMs) with two different reactive groups were fabricated successfully, which was proved by the XPS and AFM. The results of the peak values of all the related elements from XPS show that the two reactive groups can all be used to get uniform film on the matrix of silicoa It is found that the hydrolization velocity of the methoxyl is higher than that of the ethoxyl according to the datum of the elements tables of volume fraction, and the validity of this conclusion is verified by the analysis on the microstructure of topographical image of AFM. Based on the comparison of the fore- and post- topographical and phase imaging of the amine-terminated SAMs, which were annealed in a vacuum oven at 220℃ for 1h, it is concluded that the thermal stability of the film is good to some extent更多还原