节点文献
LB技术制备的ZrO2纳米薄膜摩擦学行为
Tribological Behaviors of ZrO2 Thin Films Prepared by Langmuir-Blodgett Technique
【Author】 Zhang Xiaofeng Ye Bin Dai Shuxi Du Zuliang Zhang Pingyu(Key Laboratory for Special Functional Materials,Henan University,Kaifeng Henan 475001,China)
【机构】 河南大学特种功能材料重点实验室；
【摘要】 在单晶硅表面制得花生酸锆Langmu ir-B lodgett薄膜,对该薄膜在500℃条件下热处理30 m in,得到致密ZrO2薄膜。利用AFM,XPS,SEM对其结构和形貌进行表征,摩擦磨损试验结果表明,利用该方法制备的ZrO2薄膜表现出良好的减摩抗磨性能。
【Abstract】 Zirconium oxide thin films on Si（111） substrate with controllable thickness in nanometer scale were prepared by annealing LB films of zirconium salt of arachidate at 500 ℃ for 30 minutes.The friction behavior of the film in sliding against steel ball was investigated with a reciprocating friction tester.The microstructure,morphology and wear mechanisms of the film were analyzed based on atomic force microscopic,X-ray photoelectron spectrometric,and scanning electron microscopic observations of the original and worn surfaces of the films.The results show that ZrO2 thin films sliding against steel display excellent tribological behaviors at a relatively low load.
- 【会议录名称】 2006全国摩擦学学术会议论文集（二）
- 【会议名称】2006全国摩擦学学术会议
- 【会议时间】2006-07
- 【会议地点】中国黑龙江哈尔滨
- 【分类号】TB383.1
- 【主办单位】中国机械工程学会摩擦学分会