【作者】 阎逢元； 韩修训； 张爱民； 阎鹏勋； 许世红； 牟宗信；

【Author】 YAN Feng-yuan, HAN Xiu-xun, Zhang Ai-Min, YAN Peng-xun, Xu Shi-Hong, Mu Zong-xin (State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 73000, China;State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China)

【机构】 中国科学院兰州化学物理研究所固体润滑国家重点实验室； 兰州大学等离子体与金属材料研究所； 大连理工大学三束材料改性国家重点实验室；

【摘要】 对利用直流磁控溅射技术在单晶硅表面制备的非晶碳膜进行了Cr离子注入,通过拉曼光谱、X射线光电子能谱和原子力显微镜对其结构和形貌进行了考察,在DF-PM动摩擦系数精密测定仪上测定了载荷3 N、不同湿度下薄膜的摩擦性能。结果表明,经过离子注入的非晶碳膜更趋无序化,sp3含量增多。反应型注入离子Cr在较大离子注入剂量时能够形成Cr-C化合物,使非晶碳膜的脆性增大,磨损形式发生变化。Cr离子的注入提高了非晶碳膜的耐磨寿命,改善了高湿度下非晶碳膜的摩擦性能。更多还原

【Abstract】 Amorphous carbon films were prepared on single crystal silicon substrate by direct current magnetron sputtering system. The effect of Cr+ ion implantation on the structure and tribological properties of the sputtered amorphous carbon films were investigated by means of Raman spectrometric analysis, X-ray photoelectron spectroscopic analysis, and friction and wear measurements. As the results, the structure of a-C tended to be disordered or have a growth of the sp3 content with the increase of implantation doses. The sputtering depth profiles of the films by X-ray photoelectron spectroscopy indicate that chromium carbide is formed at the interface where the implanted Cr+ has a higher concentration. Thus the anti-wear behavior of the ion-implanted film is improved. The brittleness of the a-C film is increased after implantation with Cr+ at a larger dose. This is attributed to the generation of chromium carbide from the reaction of carbon and Cr. The implantation of Cr+ helps to improve the tribological properties of amorphous carbon films in the environment with high humidity.更多还原