【作者】 朱守星； 丁建宁； 范真； 李长生； 蔡兰； 杨继昌；

【Author】 ZHU Shou-xing DING Jian-ning FAN Zhen LI Chang-sheng CAI Lan YANG Ji-chang (Micro/Nano Science & Technology Center,Jiangsu University,Zhenjiang Jiangsu 212013,China)

【机构】 江苏大学微纳米科技研究中心；

【摘要】 本文介绍了在 AFM 针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法,重点讨论了加工机理。实验考虑了样品的表面状态,周围大气状况,所加电压的极性、大小和加压方式等影响纳米加工的因素。对机理的研究表明,针尖和样品之间发生的是场致电子发射而非热电子发射,电流热效应增强粒子的扩散能力,提高了电化学反应速度。最后给出了电场诱导阳极氧化扩散增强的加工机理。更多还原

【Abstract】 In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism.Influential factors were considered including specimen’ s surface state,ambient atmosphere,polarity,magnitude and method of tip-sample applied voltage.Through analyzing the mechanism,it showed that field induced electron emission occurs at the tip and sample instead of thermal-induced electron emission.Simultaneously,heat effect by high current enhances the capability of diffusion and raises the rate of electrochemical reaction.Finally,field induced anodizing oxidation and diffusion enhanced nanofabrication mechanism was hrought forward.更多还原