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氧化镁纳米薄膜的制备与AFM研究
Preparation and AFM characterization of nano-magnesium oxide thin Film
【Author】 CHENG Xiao-li SONG Ri-xin GAO Shan HUO Li-hua~* ZHAO Jing-gui (College of Chemistry and Chemical Technology,Heilongjiang University,Harbin Heilongjiang 150080,China)
【机构】 黑龙江大学化学化工学院;
【摘要】 以 Mg(NO3)2为反应前驱物,采用溶胶一凝胶浸渍提拉法对氧化镁纳米粒子薄膜的制备工艺进行了详细研究,利用 AFM 研究了制备过程中不同条件对纳米薄膜形成的影响,寻求到较佳的制膜工艺条件。XRD 结果表明,薄膜中氧化镁粒子只存在(200)和(220)晶面取向的衍射峰。
【Abstract】 Magnesium oxide of a simple rock salt structure is a bighly ionic insulating crystalline which is stable at high temperature,and is frequently used in ceramic construction of thermo-couples and energy converters.The dielectric constant of MgO increases greatly when the material is prepared as thin films.So far,there are few reports about the preparation of MgO films by sol-gel method.Most of the films were prepared by the spin-coating sol-gel method and use the magnesium alkoxide as precursor. In this paper,magnesium oxide thin films were deposited on glass,mica and Si (100) substrates by dip-coating sol-gel technique,using Mg(NO3)2 as the starting material.The effects of some experimental conditions on the quality of the film were discussed in detail,including the precursor concentration,the surfactant concentration,sol-generation time,dip-coating speed,sintering time and layer number of the films. The MgO films were characterized by atomic force microscopy (AFM).The results indicate that better MgO nano-particulate film can be prepared by the conditions shown as follows:0.075mol/L Mg(NO3)2 alcohol solution used as tae starting material with tile addition of a small amouut of collodion.The aging time of the sol was 30 hours and the MgO films were deposited with a speed of 80mm/min.The deposited films were then taken out and kept in air until it was dried before a heat-treatment at 500℃ for 30 minutes.Multi-dipping could wake multiplayer films.The MgO particle size of the film was about 12nm measured by AFM.The X-ray diffraction pattern of muhilayer MgO films showed that the particulate film with (200) and (220) preferential orientation have been obtained after the dip-coating film was heat-treated at 500℃ for 30 min,with the particle size about 11.6nm which was proximity to the results from AFM.
- 【会议录名称】 全国第七届扫描隧道显微学学术会议(STM’7)论文集(一)
- 【会议名称】全国第七届扫描隧道显微学学术会议(STM’7)
- 【会议时间】2002-11
- 【会议地点】中国上海
- 【分类号】TB383.2
- 【主办单位】中国科学院上海原子核研究所、上海交通大学