节点文献
纳米结构可重入扫描隧道显微镜系统的研制
Design and test of the nanostructurereaccessible UHVSTM system
【Author】 FANG Sheng ZHANG Zhao-hui GAI Zheng ZHAO Ru-guang YANG Wei-sheng (State Key Laboratory for Artificial Microstructures and Mesoscopic Physics and Department of Physics,Peking University,Beijing 100871,China.)
【机构】 北京大学物理系人工微结构和介观物理国家重点实验室;
【摘要】 本文简介我们最近研制成功的超高真空(UHV)扫描隧道显微镜(STM)系统。该系统由于同时安装有扫描电子显微镜(SEM),可以使 STM 的针尖在 SEM 的引导下移到样品表面上任一感兴趣的地方去研究那里的纳米细节,从而使它的 STM 具有纳米结构可重入性。该系统还有一些特有的样品制备功能,可用于许多有应用价值的研究。
【Abstract】 We report the design and test of the new UHVSTM system that consists of a scanning electron micro- scope(SEM)and a scanning tunneling microscope(STM),along with low-energy electron diffraction(LEED), auger electron spectroscopy(AES),as well as some routine and special surface preparation facilities.The major advantage of this configuration lies in the fact that it offers the experimenter the possibility of scrutinizing the sample surface with SEM first and then guiding the STM tip to further examine interesting nanometer scale areas.In this sense the STM is nanostructure reaccessible.
【Key words】 scanning tunneling microscope(STM); scanning electron microscope(SEM); nanometer scale structure;
- 【会议录名称】 第五届全国STM学术会议论文集
- 【会议名称】第五届全国STM学术会议
- 【会议时间】1998-05
- 【会议地点】中国安徽合肥
- 【分类号】TB383.1
- 【主办单位】中国电子显微镜学会