【作者】 巴龙； 秦勇； 吴自勤；

【Author】 L.Ba Y.Qin Z.Q.Wu~* Institute of Solid State Physics,Acadmia Sinica,Hefei 230031 ~*Fundamental Physics Center,University of Science and Technology of China,Hefei 230026

【机构】 中国科学院固体物理研究所； 中国科技大学基础物理中心；

【摘要】 <正>Ge-Au 体系是典型的二元共晶系,在室温平衡状态下,二者不相溶。在蒸发沉积制成的薄膜样品中,其非平衡结构对沉积条件敏感,低金属含量和低衬底温度,促进沉积形成非晶薄膜。通过研究不同条件下沉积的合金膜的微结构,可以了解成膜机理；利用电子束诱导晶化,可以为研更多还原

【Abstract】 The microstructure of Ge-Au film was investigated using transmission electron microscopy.Experimental investigation shows that:As Au contents increased,there are more metastable phase contained in the conventional deposited GeAu films;The alloy film is entirely composed of tetragonal Ge_0.4Au_0.6metastable phase when Au content is 60at.%;Deposited on the cooled substrate,the alloy film is homogeneous amorphous;Higher aUoy contents reduces the crystallization temperature of the cryogenicly deposited amorphous film.Under the irradiation of electron beam at the acceleration voltage of 200kV,the dynamic crystallization procedure of the amorphous Ge-60at.%Au can be in-situ observed.Under increased irradiation dosage,the amorphous GeAu phase crystallized into polycrystall GeAu metastable phase,and eventually decomposed into polycrystal Ge and Au.更多还原