【作者】 陈涛； 刘勋； 左铁钏；

【机构】 北京工业大学激光工程研究院、国家产学研激光技术中心；

【摘要】 对深紫外波段的248nmKrF 准分子激光应用于铝合金(7075)和不锈钢(304)的微抛光进行了研究,简要分析了激光微抛光的机理,并且对合金材料进行试验研究,探讨微抛光效果和激光参数之间的关系。试验中改变激光工作电压,激光脉冲频率和激光脉冲数三个实验参数,对抛光后的样品测量表面粗糙度。通过试验研究,得到应用准分子激光对两种合金材料进行抛光时可达到的最小粗糙度。更多还原

【Abstract】 Micro polishing of alloys by excimer laser was researched in this paper.The mechanics of laser micro polishing was analyzed and experiment on alloys was made for studying the relationship between polish’s effects and laser’s parameters.The laser source is 248nm KrF excimer laser.The alloys were Aluminum alloy 7075 and Stainless steel 304.Test materials were polished,with changing the laser working voltage,pulse frequency and pulse count,and their surface roughness were measured by profile meter. Through experiment,the maximal surface roughness could be obtained as for alloys in use.更多还原