【作者】 朱为； 堵国梁； 史小军； 毛福明；

【Author】 ZHU Wei, DU Guoliang, SHI Xiaojun, MAO Fuming (Dept. of Electronic Engineering, Southeast University, Nanjing, 210096)

【机构】 东南大学电子工程系；

【摘要】 真空混合漏孔,如漏孔通道内含有空腔、毛细管道等,示漏气体除存在超长反应时间外,还存在超长的延迟时间和保持时间。只有经该延迟时间后,检漏仪才能探得信号。为满足真空元件在生产中的快速检漏的要求,又避免常规质谱检漏法漏检混合漏孔的可能性,可在真空室内对检漏元件集体充氦,然后在保持期内逐个检测氦气浓度来判断有无混合漏孔:也可用质谱计比较残气质谱图中空气成分来确定。更多还原

【Abstract】 t The detectable gas through vacuum mixing leak consisted of holes, capillaries in vacuum component is characterized by superlong delay and holding time except superlong ’’ response time. Only after this delay time the detectable gas can be measured by leak detector. In order to satisfy fast detection demand in the manufacture of vacuum components and to eliminate the possibility that the normal method failed in the mixing leak, We can put many components into a vacuum tank and then fill it with helium, at last take out them respectively to detect helium during its holding time . Another method is to compare air peaks in residual gas spectra with mass spectrometer.更多还原