【作者】 陈荣发； 柏乃勇； 王笃雄； 王亚成； 魏力；

【Author】 CHEN Rong-fa BAI Nai-yong Wang Du-xiong Wang Ya-chen Wei Li(Dept of Mech Engin.Engin Coll, YangZhou Univ,YangZhou ,225009,China)

【机构】 扬州大学工学院机械工程系；

【摘要】 在锂铁铁氧体材料表面,采用磁控溅射的方法,制备移相器微波传输Cu-Ti复合膜系,本文详细论述了制备该膜系的设备改造特点、工艺和性能测试。结果表明,该膜系性能指标达到移相器微波传输的要求。更多还原

【Abstract】 The Cu-Ti co-metal microwave-conduct films of phase shifters on Li-feritter material surface has been made by magnetron Sputtering deposition. In this paper, rebuilding character of machine making films, the process technology and properties measurements are introduced detailedly. It shows that the properties of this films are good to the comments of microwave-conduct of phase shifters.更多还原