【作者】 陈育荣； 杨旭东； 谢铁邦；

【Author】 CHEN Yurong, YANG Xudong, XIE Tiebang ( School of Mechanical Engineering, Huazhong University of Science and Technology, Wuhan 430074; School of Mechanical Engineering, Guizhou University, Guiyang 550003)

【机构】 华中科技大学机械工程学院； 贵州大学机械工程学院；

【摘要】 聚焦探测法是表面形貌非接触测量中的主要方法之一。然而．由于在聚焦伺服系统中采用了音圈电机．传统的聚焦探测传感器的测量精度较为有限。本文介绍了一种新型的基于改进傅科聚焦探测法且自带衍射光栅计量系统的非接触式位移传感器。因为没有采用音圈电机而是采用压电陶瓷驱动器．所以这种自带衍射光栅计量系统的传感器具有更高的精度。在测量工件表面形貌时．压电陶瓷驱动器驱动聚焦物镜进行垂直位移．从而确保在每一个采样间隔中焦点总是落在工件表面上,同时使得聚焦误差信号回零。该非接触式位移传感器的分辨率为10nm。更多还原

【Abstract】 Focus detection method is one of the primary non-contact measurement methods of surface topography. However, the measurement accuracy of traditional focus detection sensor is limited because the volume motor is adopted in the focus servo system. This paper presents a new non-contact displacement sensor with diffraction grating metrology system based on an improved Foucault focus detection method. Driven by piezoelectric actuator instead of volume motor, the .sensor with diffraction grating metrology system has higher measurement accuracy. When measuring the surface of workpiece, the piezoelectric actuator drive focusing lens to move vertically to ensure that the focus is always on the surface of workpiece in every sample interval, and the focused signal error return to zero. The measurement resolution of the non-contact displacement sensor is 10 nm.更多还原