【作者】 刘延辉； 岑少易； 周细应；

【Author】 LIU Yan-hui CEN Shao-yi ZHOU Xi-ying (Department of Material Science and Engineering,Shanghai University of Engineering and Science,Shanghai 201620,China)

【机构】 上海工程技术大学材料工程学院；

【摘要】 用扫描探针分析技术,研究了直流磁控溅射工艺参数对锌薄膜形态与生长的影响。结果表明,随着衬底温度和直流溅射功率的降低,锌薄膜表面形成了细密的锌岛;当溅射氩气压发生变化时,锌薄膜表面锌岛的尺寸没有明显变化,但表面粗糙度和垂直衬底最高落差随着氩气压的升高而升高。更多还原

【Abstract】 Effects of process parameter of DC magnetron sputtering on zinc film was analyzed by scanning probe microscope.Results show that fine zinc salience was formed on the surface of zinc film,with fall of substrate temperature and power of DC magnetron sputtering.When Ar pressure was raised,size of zinc salience does not obviously change,surface roughness and the highest throw which is normal to substrate gone up.更多还原