【作者】 徐军明； 程筱军； 胡晓萍； 郑梁； 胡冀；

【Author】 XU Jun-ming CHENG Xiao-jun HU Xiao-ping ZHENG Liang HU Ji (College of Electronic Information,Hangzhou Dianzi University,Hangzhou 310018,China)

【机构】 杭州电子科技大学电子信息学院；

【摘要】 在硅基底上使用旋涂法制备均匀催化剂涂层,并用CVD法制备定向纳米碳管。其过程为:配制1mol/L浓度的Fe（NO₃）₃酒精溶液,加入适量的增稠剂搅拌均匀后在硅基底上进行旋涂,经600℃烘烤后在硅基底上形成均匀Fe₂O₃膜层,对含有Fe₂O₃膜的样品使用CVD法制备了纳米碳管。CVD法制备纳米碳管前的NH₃处理对最终获得的纳米碳管的形状及定向纳米碳管的取向程度起着非常重要的作用,具体考察了NH₃处理时间对纳米碳管的影响,用SEM和TEM现察了纳米碳管,并与溅射法制备的催化剂生长的纳米碳管进行了比较。更多还原

【Abstract】 Aligned carbon nanotubes were synthesized by CVD method with the even catalyst film spin coated on silicon substrate.The detail was.1mol/L Fe（NO₃）₃ ethanol solution was prepared and a certain viscosifier was added and stirred until homogeneous.The solution was spin coated on silicon and calcinated at 600℃to form e- ven Fe₂O₃ film.Aligned carbon nanotubes were prepared by CVD method with the specimen.NH₃ treatment be- fore MWNT growth by CVD played very important role on the quality and orientation of carbon nanotubes.Af- ter observation of carbon nanotubes with different time NH₃ treatment,it was shown that 120 mins treatment of 200ml/min NH₃ was fitted to aligned carbon nanotubes growth.The synthesized carbon nanotubes were ob- served with SEM and TEM and the results were compared to the MWNTs prepared on catalyst film with sputte- ring method.更多还原