【作者】 赵亮； 尹盛； 王敬义； 赵伯芳；

【Author】 ZHAO Liang YIN Sheng WANG Jing-yi ZHAO Bai-fang (Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China)

【机构】 华中科技大学电子科学与技术系；

【摘要】 通过对振动阴极反应室的研究,针对粉粒与金属阴极接触的问题,提出新的改进设计．采用射频电源感应线圈,振动石英管内部放电的方式进行刻蚀．既有振动阴极反应室的效果,又避免掺入杂质,是一种可行的新反应室设计．更多还原

【Abstract】 By the research of vibration cathode chamber,the new improvement design,which is directed against the problem of the particulates in contact with the metal cathode,was put forward.Using the RF power supply and induction coil make discharge in the vibration quartz tube to finish etching.In this way,the device could have both of the same effect with the vibration cathode chamber and avoiding to soak new impurity.The chamber design is feasible.更多还原