【作者】 王敬义； 尹盛； 赵亮； 赵伯芳；

【Author】 WANG Jing-yi YIN Sheng ZHAO Liang ZHAO Bai-fang (Department of Electronic Science and Technology,Huazhong University of Science and Technology,Wuhan 430074,China)

【机构】 华中科技大学电子科学与技术系；

【摘要】 介绍了在冷等离子体中粉体研究的几个重要成果,分析了粉体在两种反应室结构中的运动、沉降时间及刘蚀状况．理论分析和实验结果表明带振动阴极的反应室在粉体表面刻蚀方面比传统阴极结构的反应室要优越得多．研究表明冷等离子体对硅粉纯化具有应用前景．更多还原

【Abstract】 Several important achievements of research for particulates in cold plasma are introduced,the motion,etching and stop time of particulates in two kinds of chambers are provided in the paper.Both of the theory and test results show that the particulate surface etching in the chamber with vibration cathode have many advantages over the traditional ones. This study could open application prospect for Si purity.更多还原