【作者】 邢光建； 李朝阳； 于春娜； 王怡； 武光明；

【Author】 XING Guang-jian~1 LI Chao-yang~2 YU Chun-na~3 WANG Yi~3 WU Guang-ming~1 (1.Department of Materials Science and Engineering,Beijing Institute of Petrochemical Technology,Beijing I02617,China;2.Plasma Physics and Material Laboratory,Beijing Institute of Graphic Communication,Beijing 102600,China;3.Department of Mathematics and Physics,Beijing Institute of Petrochemical Technology,Beijing 102617,China)

【机构】 北京石油化工学院材料科学与工程系； 北京印刷学院等离子体物理与材料实验室； 北京石油化工学院数理系；

【摘要】 利用磁控溅射方法在 N₂气氛下制备出了 LiSiPON 电解质薄膜,研究了薄膜的结构、形貌和组成,着重探讨了薄膜中 N 含量对薄膜离子电导率的影响．随着 N₂分压的增加,薄膜中的 N 含量逐渐增加,0．53Pa 时达到最大,超过此分压 N 含量又逐步下降．随着薄膜中 N 含量的增加,离子电导率提高,最大达10．4×10^-6S/cm（室温）, 这对固态电解质薄膜来说是足够了．为了测量电解质薄膜的电化学稳定性,组装了 LiCoO₂/LiSiPON/SnO₂薄膜电池, 显示出了良好的循环性能．更多还原

【Abstract】 LiSiPON electrolyte films were prepared by RF magnetron sputtering under pure N₂.The structure,morphology and composition of the LiSiPON electrolyte films were studied and the influence of the N content on the ionic conductivity of the films was investigated in detail.The N content of the films increased with the increasing of N₂ partial pressure and reached a maximum value at 0.53Pa.For higher N₂ partial pressure （＞0.53Pa）,N content began to decrease. The ionic conductivity of the LiSiPON films strongly depended on the N content of the films.With the increasing of the N content,the ionic conductivity of the films improved.The ionic conductivity of the film with higher N content measured at room temperature approaches 10.4×10^-6S/cm,which was sufficient for the solid electrolyte films.For measurement of electrochemical stability of the electrolyte films,LiSiPON electrolyte film was incorporated into LiCoO₂/SnO₂ thin film battery,showing a good cycling performance.更多还原