【作者】 邱东江； 罗盂波； 丁扣宝； 施红军；

【Author】 QIU Dong-jiang~1 LUO Meng-bo~1 DING Kou-bao~2 SHI Hong-jun~2 (1.Department of Physics,Zhejiang University,Hangzhou 310027,China; 2.Department of Information and Electronic Engineering,Zhejiang University,Hangzhou 310027,China)

【机构】 浙江大学物理系； 浙江大学信电系；

【摘要】 采用电子束反应蒸发法,（MnO）_y（ZnO）_1-y（y ≥0．3）陶瓷靶作为蒸发源,高 Ar 含量的 Ar／O₂混合气为反应气体,在石英玻璃衬底上生长得到 Mn 含量超过 50％（原子分数）的 Zn_1-xMn_xO 薄膜．场发射扫描电子显微镜和 X 射线衍射测量显示 x＞0．5的 Zn_1-xMn_xO 薄膜呈单一晶相的立方相、岩盐矿结构．这与采用 ab initio 方法计算得到的结果一致（作为简化,计算时未考虑 Mn 的自旋的影响）,即对于 x≥0．5的 Zn_1-xMn_xO 材料体系,其取类 MnO 的立方岩盐矿结构比取类 ZnO 的六方相纤锌矿结构更稳定．对石英玻璃基 Zn_1-xMn_xO 薄膜的紫外-可见透射光谱测量表明,随着 Mn 含量从0增大到0．68,Zn_1-xMn_xO 薄膜的光学带隙从3．35eV 增大到 5．02eV．磁性测量结果表明,所制备立方 Zn_0．32Mn_0．68O 薄膜在室温下没有表现出宏观磁性．更多还原

【Abstract】 We report on the reactive electron beam evaporative growth of single-phase cubic Zn_1-xMn_xO films on quartz substrates using polycrystalline（MnO）_y（ZnO）_1-y（y≥0.3）ceramic target as source material.The growth was carded out in the environment of Ar/O₂ gas mixture with the volume ratio of Ar:O₂ in the range 1:1～3:1.Field emission scanning electron microscopy（FESEM）revealed unique surface morphology of cubic Zn_1-xMn_xO film compared with that of hexagonal one.X-ray diffraction（XRD）measurements revealed that Zn_1-xMn_xO films are of single hexagonal phase,single cubic phase and mixed h+c phase,corresponding to x=0.25（as well as that of x=0.12）,x=0.68 and x=0.47,respectively. Such XRD results are consistent with the data obtained from ab initio calculations,i.e.,for the Zn_1-xMn_xO system with x≥0.5, cubic rock salt structure is more stable compared with that of hexagonal wurtzite structure.UV-vis transmission investigations demonstrated that the band gap of Zn_1-xMn_xO film broadened from 3.35 to 5.02eV along with the increase of Mn content from 0 to 0.68.However,no ferromagnetism is found at room temperature for cubic Zn_0.32Mn_0.68O film.更多还原