【作者】 刘春泽； 周斌； 徐翔； 杜艾； 叶君建； 张志华； 吴广明； 沈军；

【Author】 LIU Chun-ze ZHOU Bin XU Xiang DU Ai YE Jun-jian ZHANG Zhi-hua WU Guang-ming SHEN Jun (Pohl Institute of Solid State Physics,Tongji University,Shanghai 200092,China)

【机构】 同济大学波耳固体物理研究所；

【摘要】 采用一步催化法,制备 ZrO₂光敏溶胶,用提拉法形成了单层光敏凝胶膜．采用紫外光刻技术,将掩摸图形转移到光敏凝胶膜上,通过曝光角度的控制,实现具有一定倾角的闪耀光栅制备．以紫外分光光度计, 红外分光光度计,原子力显微镜等方法对光敏凝胶膜及光栅图形进行了性能测试及表征．并用355nm 激光系统进行衍射效率及激光损伤阈值测定．获得了周期为 2μm,高度为60mn,闪耀角为3°的闪耀光栅。更多还原

【Abstract】 A negative tone sol-gel material was applied to the fabrication of blazed grating by UV direct writing lithography.The one-step process was used to prepare ZrO₂ photosensitive sol The negative tone gel film was irradiated with high pressure mercury lamp through the mask and leached in ethyl alcohol.The surface profile was direct controlled by the UV exposure dosage and angel of incidence.As an example,a blazed grating with a period of 2μm and height of 60nm was fabricated.更多还原