【作者】 应子罡； 吕昕； 高本庆； 李拂晓； 高建峰；

【Author】 Ying Zi Gang~(1 2) Lv Xin~1 Gao BenQing~1 Li FuXiao~2 GaoJianFeng~2 ~1(Department of Electronic Engineering, School of Information Science and Technology, Beijing Institute of Technology, Beijing 100081, China) ~2(Nanjing Electronics Devices Institute, Nanjing 210016, China)

【机构】 北京理工大学信息科学技术学院； 南京电子器件研究所；

【摘要】 单片微波集成电路(MMIC)在当今电子业的巨大推动下得到迅速的发展,其中器件测试方法的准确度直接影响到模型库的建立,并进一步关系到产品的成本、周期和监测等问题。传统的MMIC去嵌入方法是基于等效电路模型进行网络参数剥离,随着新的化合物材料的应用使器件的工作频率不断提高,这时传统方法会带来很大误差。本文引入了SOLT校准方法利用误差网络来实现去嵌入,并给出测试方法的步骤,流片试验结果分别同三维全波电磁场仿真比较,证明本文的校准方法更具准确性和实用性。更多还原

【Abstract】 MMIC has been developed rapidly with the propulsion of the Electronic Industries。Whether or not the test method of device is precise enough has significant effect on the construction of the model library, furthermore, it has effect on the cost, period and detection of the products. Since the use of new compound materials, the frequency of the device has increased continually, so the conventional MMIC de-embedding method which uses the equivalent circuit model to peel off the net parameters will bring noticeable error. In this paper, we introduce SOLT calibration method, take advantage of the error net for the implementation of the de-embedding. A detailed description of the steps of measurement methods is presented in the paper, and the comparison of the result of the test with the simulation result which using 3-D full wave electromagnetic method is also shown. The new calibration method in this paper is proved to be more exact and applicable.更多还原