【作者】 杨建华； 张通和；

【Author】 YANG Jian-hua;ZHANG Tong-he Basic Science Department of Nantong Institute of Technology Nantong, 226007,China Radiation Beam and Materials Engineering Lab, Beijing, 100875, China

【机构】 南通工学院基础部； 教育部射线束和材料工程实验室；

【摘要】 采用由金属蒸汽真空弧离子源（MEVVA）引出的强束流脉冲Ti、Mo、W、Ta离子对C12、H21、H13钢进行了离子注入研究.注入剂量为3×10¹⁷～5×10¹⁷cm^-2,引出电压为25～48kV,平均束流为25～50μA·cm^-2.利用卢瑟福背散射谱（RBS）测量了注入表面的成分,借助X射线衍射仪（XRD）和X射线光电子能谱仪（XPS）考察了注入样品的微观结构.更多还原

【Abstract】 Metal1ic ions extracted from a metal vapor vacuum arc ion source were implanted into die steel,with animplantation dose of（3-5）×10¹⁷cm^-2, extraction acceleration 42-48kV and average ion beam flux about 25-50μA·cm^-2. Rutherford backscattering spectrum was used to measure the surface composition after ion implantation. Observationof surface oxidizing and microstructure was carried out by X-ray diffration analysis and X-ray photoelectronspectroscopy.更多还原